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Volumn 527-529, Issue PART 1, 2006, Pages 387-390
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Examining dislocations in SiC epitaxy by light emission from simple diode structures
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Author keywords
Degradation; Dislocations; PiN diodes; Stacking faults; V
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Indexed keywords
ALUMINUM;
DIODES;
ELECTROLUMINESCENCE;
EPITAXIAL GROWTH;
EPITAXIAL LAYERS;
LIGHT EMISSION;
METALLIC FILMS;
MICROFABRICATION;
BASAL PLANE DISLOCATIONS (BPDS);
ELECTROLUMINESCENT IMAGING;
VOLTAGE CHARACTERISTICS;
SILICON CARBIDE;
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EID: 34249085012
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/0-87849-425-1.387 Document Type: Conference Paper |
Times cited : (5)
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References (4)
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