Correlation between Vickers microhardness, porous layer thickness and porosity in p-type nanostructured silicon

Applied Surface Science

Volumn 253, Issue 17, 2007, Pages 7188-7191

  Morales Masis M ^a   Segura, L ^b   Ramirez Porras A ^b  

^a WRIGHT STATE UNIVERSITY   (United States)

^b UNIVERSIDAD DE COSTA RICA   (Costa Rica)

Author keywords

Microhardness; Porous silicon; Vickers indentation

Indexed keywords

CURRENT DENSITY; ELECTROCHEMICAL ETCHING; HYDROFLUORIC ACID; INDENTATION; MICROHARDNESS; NANOSTRUCTURED MATERIALS; POROSITY; VICKERS HARDNESS;

MICROINDENTATION; POROUS LAYER THICKNESS; VICKERS INDENTATION;

POROUS SILICON;

EID: 34249026122     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.190     Document Type: Article

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