Slow oxide trap density profile extraction using gate current low-frequency noise in ultrathin oxide MOSFETs

Microelectronic Engineering

Volumn 84, Issue 9-10, 2007, Pages 2382-2385

  Armand, J ^a   Martinez, F ^a   Valenza, M ^a   Rochereau, K ^b   Vincent, E ^c  

^a UNIVERSITÉ MONTPELLIER II   (France)

^b NXP SEMICONDUCTORS   (France)

^c STMICROELECTRONICS   (France)

Author keywords

Green's function; Low frequency noise; Trap profiles

Indexed keywords

ACOUSTIC NOISE MEASUREMENT; COMPUTER SIMULATION; ELECTRIC POTENTIAL; GREEN'S FUNCTION; MATHEMATICAL MODELS; MOSFET DEVICES; THIN FILM TRANSISTORS;

LOW FREQUENCY NOISE; TRAP PROFILES;

GATE DIELECTRICS;

EID: 34248671406     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.04.099     Document Type: Article

References (9)

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