Electrostatic polymer-based micro-deformable mirror for adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6467, Issue , 2007, Pages

  Zamkotsian, Frederic ^a   Conedera, Veronique ^b   Granier, Hugues ^b   Liotard, Arnaud ^a   Lanzoni, Patrick ^a   Salvagnac, Ludovic ^b   Fabre, Norbert ^b   Camon, Henri ^b  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b LAAS CNRS   (France)

Author keywords

Adaptive optics; High order perturbation correction; Micro deformable mirror; Open loop driving; Polymer electrostatic actuator; Polymer materials

Indexed keywords

ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; MIRRORS; OPTICAL SYSTEMS; PARAMETER ESTIMATION; POLYNOMIALS;

HIGH ORDER PERTURBATION CORRECTION; MICRO DEFORMABLE MIRRORS; OPEN LOOP DRIVING; POLYMER ELECTROSTATIC ACTUATORS; POLYMER MATERIALS;

ADAPTIVE OPTICS;

EID: 34248575958     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.705256     Document Type: Conference Paper

References (13)

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