Fabrication of Pt-IrOx and Au-V2O5 thin films

Key Engineering Materials

Volumn 345-346 I, Issue , 2007, Pages 735-740

  Vinci, R P ^a   Bannuru, T ^a   Hyun, S ^b   Brown, W L ^a  

^a Lehigh University   (United States)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

Au; Ir; Oxide dispersion; Pt; Reactive sputtering; Thin films; V

Indexed keywords

ANNEALING; DEPOSITION RATES; GOLD COMPOUNDS; MAGNETRON SPUTTERING; PARTIAL PRESSURE; PLATINUM COMPOUNDS; REACTIVE SPUTTERING; THERMODYNAMICS;

LOW EQUILIBRIUM; MULTIPLE TARGETS; OXIDE DISPERSION; POST ANNEALING;

THIN FILMS;

EID: 34248561252     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-440-5.735     Document Type: Conference Paper

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