Preparation and properties of IrO2 thin films grown by dc magnetron reactive sputtering method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4086, Issue , 2000, Pages 454-457

  Wang, Shijun ^a   Ding, Aili ^a   Qiu, Pingsun ^a   He, Xiyun ^a   Luo, Weigen ^a  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

1r02 thin film; DC magnetron reactive sputtering; Fatigue; PZT

Indexed keywords

ELECTRODES; FILM PREPARATION; IRIDIUM COMPOUNDS; MAGNETRONS; MORPHOLOGY; OXIDE FILMS; PLATINUM COMPOUNDS; REACTIVE SPUTTERING; SILICA; SILICON;

ANNEALED FILMS; ANNEALING CONDITION; CRYSTALLINE NATURE; DC MAGNETRON REACTIVE SPUTTERING; FATIGUE PROPERTIES; HIGH ORIENTATION; IRIDIUM OXIDES; SPUTTERING PARAMETERS;

THIN FILMS;

EID: 34248574408     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.408293     Document Type: Conference Paper

References (4)

1. Einarsrud M A, Nilson E, 1998 Journal Non-Crystalline Solids 226 122-128
2. Haereid 5, Dahle M, Einarsrud M A, 1995 Journal Non-Crystalline Solids 186 96-103
3. Floch H G, Belleville P F, 1992 SPIE Vol.1758, Sol-Gel Optics II , 135-149
4. Wu Guangming, Yang Tianhe, Wang Jue, Zhang Huilin, Shen Jun , Nano Porous SiO, Anti-reflective Coatingsfor Solar Heat Collectors, 2000, High Temperatures-High Pressures 32