Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6463, Issue , 2007, Pages

  Bannuru, T ^a   Narksitipan, S ^b   Brown, W L ^a   Vinci, R P ^a  

^a Lehigh University   (United States)

^b CHIANG MAI UNIVERSITY   (Thailand)

Author keywords

Au alloys; Contact resistance; Hardness; MEMS switches

Indexed keywords

CONTACT RESISTANCE; ELECTRIC CONTACTS; HARDNESS; MEMS; NANOINDENTATION; SWITCHING SYSTEMS; THIN FILMS;

MEMS SWITCHES; NANOINDENTATION HARDNESS;

GOLD ALLOYS;

EID: 34247356929     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.700834     Document Type: Conference Paper

References (6)

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3. Coutu RA Jr et al. J Micromech. Microeng. 2004;14:1157.
4. Fischer-Cripps AC. ISBN: 0-387-95394-9, Springer series.
5. Bannuru T, Narksitipan S, Brown WL, Vinci RP, submitted to Scripta Mat 2006.
6. Slade Paul G. ISBN 0-8247-1934-4, Marcel Dekker Publishers, New York.