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Volumn 18, Issue 6, 2007, Pages 1740-1747

Dynamic characteristic testing for MEMS micro-devices with base excitation

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; MICROSTRUCTURE; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; SPECTRUM ANALYSIS;

EID: 34248213503     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/6/S12     Document Type: Article
Times cited : (18)

References (13)
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  • 3
    • 0036772740 scopus 로고    scopus 로고
    • Measurement system for full three-dimensional motion characterization of MEMS
    • Rembe C and Muller R S 2002 Measurement system for full three-dimensional motion characterization of MEMS J. Microelectromech. Syst. 5 479-88
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  • 4
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    • 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope
    • Petitgrand S, Yahiaoui R and Danaie K 2001 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope Opt. Lasers Eng. 2 77-101
    • (2001) Opt. Lasers Eng. , vol.36 , Issue.2 , pp. 77-101
    • Petitgrand, S.1    Yahiaoui, R.2    Danaie, K.3
  • 5
    • 0037204062 scopus 로고    scopus 로고
    • Novel bulk acoustic wave hammer to determinate the dynamic response of microstructures using pulsed broad bandwidth ultrasonic transducers
    • Lai W P and Fang W 2001 Novel bulk acoustic wave hammer to determinate the dynamic response of microstructures using pulsed broad bandwidth ultrasonic transducers Sensors Actuators A 96 43-52
    • (2001) Sensors Actuators , vol.96 , Issue.1 , pp. 43-52
    • Lai, W.P.1    Fang, W.2
  • 8
    • 29144510561 scopus 로고    scopus 로고
    • Dynamic characterization of MEMS cantilevers in liquid environment using a low-cost optical system
    • Scuor N, Gallina P, Sbaizero O and Mahajan R L 2005 Dynamic characterization of MEMS cantilevers in liquid environment using a low-cost optical system Meas. Sci. Technol. 17 173-80
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    • Scuor, N.1    Gallina, P.2    Sbaizero, O.3    Mahajan, R.L.4
  • 9
    • 33745484909 scopus 로고    scopus 로고
    • A method of evaluating the dynamic response of materials to forced oscillation
    • Fujii Y 2006 A method of evaluating the dynamic response of materials to forced oscillation Meas. Sci. Technol. 17 1935-40
    • (2006) Meas. Sci. Technol. , vol.17 , Issue.7 , pp. 1935-1940
    • Fujii, Y.1
  • 10
    • 3442893804 scopus 로고    scopus 로고
    • Development of a dynamic driving line power for piezoelectric ceramic actuator
    • Wang H, Zhong C W and Zhang S R 2004 Development of a dynamic driving line power for piezoelectric ceramic actuator Piezoelectr. Acoustoopt. 26 189-91
    • (2004) Piezoelectr. Acoustoopt. , vol.26 , pp. 189-191
    • Wang, H.1    Zhong, C.W.2    Zhang, S.R.3
  • 11
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    • Signal detection based on LabView and data acquisition card
    • Zhang M and Xu X 2000 Signal detection based on LabView and data acquisition card J. Nor. JT. University 24 78-81
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    • Zhang, M.1    Xu, X.2
  • 12
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    • Design and fabrication of microcantilever integrated with PZT thin film sensor and actuator
    • Liu M W, Tong J H, Cui T H, Dong W J, Cui Y, Wang J and Wang L D 2005 Design and fabrication of microcantilever integrated with PZT thin film sensor and actuator Chin. Mech. Eng. 16 467-8
    • (2005) Chin. Mech. Eng. , vol.16 , pp. 467-468
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.