A Bayesian approach for disturbance detection and classification and its application to state estimation in run-to-run control

IEEE Transactions on Semiconductor Manufacturing

Volumn 20, Issue 2, 2007, Pages 126-136

  Wang, Jin ^a,b   He, Q Peter ^a,c  

^a IEEE   (United States)

^b AUBURN UNIVERSITY   (United States)

^c TUSKEGEE UNIVERSITY   (United States)

Author keywords

Bayesian statistics; Disturbance classification; Disturbance detection; Process control; State estimation

Indexed keywords

BAYESIAN STATISTICS; DISTURBANCE CLASSIFICATION; DISTURBANCE DETECTION;

BAYESIAN NETWORKS; CLASSIFICATION (OF INFORMATION); OPTIMIZATION; PROBABILITY; STATE ESTIMATION; STATISTICAL METHODS;

PROCESS CONTROL;

EID: 34248175909     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2007.895216     Document Type: Conference Paper

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