Ion optic calculations and installation of a modified SIMS ion source

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 259, Issue 1, 2007, Pages 118-122

  Knies, D L ^a   Grabowski, K S ^a   Cetina, C ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b NOVA RESEARCH INC   (United States)

Author keywords

Accelerator mass spectrometry; Molecular interference; Secondary ion mass spectrometry; Trace element

Indexed keywords

CATHODES; LENSES; SECONDARY ION MASS SPECTROMETRY; SURFACE ANALYSIS; TRACE ELEMENTS;

ACCELERATOR MASS SPECTROMETRY; EINZEL LENS; MOLECULAR INTERFERENCE; SECONDARY ION COLUMNS;

ION SOURCES;

EID: 34248140066     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.150     Document Type: Article

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