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Volumn 123, Issue 1-4, 1997, Pages 566-570

A new accelerator mass spectrometer for trace element analysis at the Naval Research Laboratory

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATOR MAGNETS; IMAGE QUALITY; IMPURITIES; ION BEAMS; ION SOURCES; SECONDARY ION MASS SPECTROMETRY; TRACE ELEMENTS;

EID: 0031546876     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00627-1     Document Type: Article
Times cited : (12)

References (14)
  • 1
    • 0041765253 scopus 로고
    • The National Technology Roadmap for Semiconductors Semiconductor Industry Association, San Jose, CA
    • The National Technology Roadmap for Semiconductors (Semiconductor Industry Association, San Jose, CA, 1994).
    • (1994)
  • 9
    • 0041765252 scopus 로고    scopus 로고
    • US Patent No. 5,508,515 (1996).
    • H.A. Enge, US Patent No. 5,508,515 (1996).
    • Enge, H.A.1
  • 14
    • 0043268346 scopus 로고    scopus 로고
    • to be published
    • K.H. Purser, to be published.
    • Purser, K.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.