Dual-beam focused ion beam (FIB): A prototyping tool for micro and nanofabrication

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 789-792

  Romano Rodríguez, Albert ^a   Hernández Ramírez, Francisco ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Deposition; Focused ion beam; Milling; Nanofabrication

Indexed keywords

COMMINUTION; DEPOSITION; ELECTRON BEAMS; ION BEAM ASSISTED DEPOSITION; MICROFABRICATION; NANOTECHNOLOGY; NANOWIRES; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAM ASSISTED DEPOSITION; METAL ORGANIC GASES; MICROINDUCTORS;

FOCUSED ION BEAMS;

EID: 34247891642     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.113     Document Type: Article

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