Selective deposition of the silver nano-particles using patterned the hydrophobic self-assembled monolayer patterns and zero-residual nano-imprint lithography

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1552-1555

  Yang, Ki Yeon ^a   Kim, Jong Woo ^a   Byeon, Kyeong Jae ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

Nano imprint lithography; SAM pattern; Selective deposition; Silver nano particle

Indexed keywords

DEPOSITION; HYDROPHOBICITY; NANOIMPRINT LITHOGRAPHY; SELF ASSEMBLED MONOLAYERS;

SAM PATTERN; SELECTIVE DEPOSITION; SILVER NANO-PARTICLE; ZERO-RESIDUAL LAYER;

NANOPARTICLES;

LITHOGRAPHY; WATER REPELLENCE;

EID: 34247638497     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.159     Document Type: Article

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