Development of a micro-manipulator based on piezoelectric-technology

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1333-1336

  Götze, Holger ^a   Pagel, Lienhard ^a  

^a UNIVERSITY OF ROSTOCK   (Germany)

Author keywords

Micro manipulation; PCB technology; Piezoelectric technology

Indexed keywords

CELL CULTURE; MICROFLUIDICS; MICROSYSTEMS; PIEZOELECTRICITY; PRINTED CIRCUIT BOARDS;

LAMINAR DIFFUSION; MICRO POSITIONING; MICRO-MANIPULATOR; THERMO-PNEUMATIC MICRO-MEMBRANE PUMP;

MICROMANIPULATORS;

EID: 34247634617     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.275     Document Type: Article

References (7)

1. Merkel T., Gräber M., and Pagel L. A new technology for fluidic micro-systems based on PCB technology. Sensors Actuat. A 77 2 (1999) 98-105
2. Wego A., and Pagel L. A self-filling micropump based on PCB technology. Sensors Actuat. A88 (2001) 220-226
3. H. Götze, St. Gaßmann, L. Pagel, Design and Testing of static laminar diffusion mixer with convective cross mixture based on PCB technology, Micromechanics Europe 2005, Göteborg, Sweden, (2005) 334-337.
4. H. Götze, St. Gaßmann, L. Pagel, Entwicklung und Vergleich auf Leiterplattentechnologie basierender statischer Mikromischer, MST Kongress 2005, Freiburg, Germany, D01 (2005) 689-692.
5. Läritz C., and Pagel L. A microfluidic pH-regulation system based on printed circuit board (PCB) technology. Sensors Actuat. A 84 (2000) 230-235
6. Zhong Z.W., and Nah S.K. Thermal strain analysis of an electronics package using the SEM moir'e technique. Solder. Surf. Mount Technol. 15 3 (2003) 33-35
7. Pokines B.J., and Garcia E. A smart material micro-amplification mechanism fabricated using LIGA. Smart Mater. Struct. 7 (1998) 105-112