Graphitic tube transformation of FIB-CVD pillar by Joule heating with flash discharge

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1507-1510

  Fujita, Jun Ichi ^a,b   Nakazawa, Shotaro ^a,b   Ichihashi, Toshinari ^a,c   Ishida, Masahiko ^a,c   Kaito, Takashi ^d   Matsui, Shinji ^a,e  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

^c NEC CORPORATION   (Japan)

^d SII NANOTECHNOLOGY INC   (Japan)

^e UNIVERSITY OF HYOGO   (Japan)

Author keywords

Amorphous carbon; FIB CVD; Ga; Joule heating; Nanotube; Solid phase; Transformation

Indexed keywords

AMORPHOUS CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRIC DISCHARGES; FOCUSED ION BEAMS; JOULE HEATING; MULTIWALLED CARBON NANOTUBES (MWCN); PHASE TRANSITIONS;

CATALYTIC TRANSFORMATION; GRAPHITIC TUBE; SOLID PHASE REACTIONS;

GALLIUM COMPOUNDS;

EID: 34247621330     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.252     Document Type: Article

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