Quantitative texture analysis of electrodeposited line patterns

Materials Science Forum

Volumn 495-497, Issue PART 2, 2005, Pages 1455-1460

  Pantleon, Karen ^a   Somers, Marcel A J ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Copper; Electroplating; Epitaxy; Nickel; Texture; Thin films; X ray diffraction

Indexed keywords

ELECTRODEPOSITION; EPITAXIAL GROWTH; LITHOGRAPHY; NICKEL; PHYSICAL VAPOR DEPOSITION; TEXTURES; THIN FILMS; X RAY DIFFRACTION;

TEXTURE ANALYSIS;

COPPER;

EID: 34247587468     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-975-x.1455     Document Type: Conference Paper

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