Improvement of flow and pressure controls in diffusion-tube humidity generator: Performance evaluation of trace-moisture generation using cavity ring-down spectroscopy

Sensors and Actuators, A: Physical

Volumn 136, Issue 2, 2007, Pages 723-729

  Abe, Hisashi ^a   Kitano, Hiroshi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Critical flow Venturi nozzle; Diffusion tube; Humidity standard; Magnetic suspension balance; Sensor calibration; Trace moisture

Indexed keywords

BUOYANCY; DIFFUSION; EVAPORATION; FLOW CONTROL; FLOW RATE; PRESSURE CONTROL;

CRITICAL FLOW VENTURI NOZZLE; DIFFUSION TUBES; HUMIDITY STANDARD; MAGNETIC SUSPENSION BALANCE; SENSOR CALIBRATION; TRACE MOISTURE REGION;

HUMIDITY SENSORS;

EID: 34247584007     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.12.013     Document Type: Article

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