International comparison of a NIST primary standard with an NRLM transfer standard for small mass flow rates of nitrogen gas

Metrologia

Volumn 35, Issue 3, 1998, Pages 211-221

  Wright, J D ^a   Mattingly, G E ^c   Nakao, S ^b   Yokoi, Y ^c   Takamoto, M ^c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

SMALL GAS FLOW MEASUREMENT; SONIC VENTURIS;

CHEMICAL SENSORS; FLOW MEASUREMENT; FLOW OF FLUIDS; GRAVIMETERS; PRESSURE TRANSDUCERS; STANDARDS;

NITROGEN;

EID: 0032313866     PISSN: 00261394     EISSN: None     Source Type: Journal    
DOI: 10.1088/0026-1394/35/3/10     Document Type: Article

References (8)

1. Mattingly G. E., In Flow Measurement: Practical Guides for Measurement and Control (Edited by D. W. Spitzer), Pittsburgh, Instrument Society of America, 1991, 575-587.
2. Tison S. A., A Critical Evaluation of Thermal Mass Flow Meters, J. Vac. Sci. Technol. A, 1996, 14, 2582-2591.
3. Wright J. D., Mattingly G. E., NIST Calibration Services for Gas Flow Meters: Piston Prover and Bell Prover Gas Flow Facilities, NIST Special Publication 250-49, August 1998.
4. Mattingly G. E., Round-Robin Mass Flow Controller Gas Flow Calibration Test Results Using the NIST-SEMATECH-MARK 1 Gas Flow Measurement Artifact: Final Report, Tech. Transfer No. 93051631A-ENG, SEMATECH, Austin, Texas, 1993.
5. Nakao S., Yokoi Y., Takamoto M., Development of a Calibration Facility for Small Mass Flow Rates of Gas and the Uncertainty of a Sonic Venturi Transfer Standard, Flow Meas. Instrum., 1996, 7, 77-83.
6. Thermophysical Properties of Fluids, JSME Data Book (Edited by Japanese Society of Mechanical Engineers), 1983.
7. Taylor B. N., Kuyatt C. E., Guidelines for Evaluating and Expressing the Uncertainty of NIST Measurement Results, NIST Technical Note 1297, 1994.
8. Tison S. A., Berndt L., High Differential Pressure Laminar Flow Meter, In Proc. 1997 ASME Fluids Engineering Summer Meeting, Vancouver, Canada, June 1997.