Development of humidity standard in trace-moisture region: Characteristics of humidity generation of diffusion tube humidity generator

Sensors and Actuators, A: Physical

Volumn 128, Issue 1, 2006, Pages 202-208

  Abe, Hisashi ^a,b   Kitano, Hiroshi ^a,b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Diffusion tube; Humidity standard; Sensor calibration; Trace moisture

Indexed keywords

DIFFUSION TUBES; HUMIDITY STANDARDS; SENSOR CALIBRATION; TRACE MOISTURE;

CALIBRATION; DIFFUSION; EVAPORATION; HUMIDITY CONTROL; NITROGEN; REAL TIME SYSTEMS; SENSORS; TRACE ANALYSIS;

ATMOSPHERIC HUMIDITY;

EID: 33645145846     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.049     Document Type: Article

References (7)

1. International Technology Roadmap for Semiconductors, 2004.
2. H.H. Funke, B.L. Grissom, C.E. McGrew, and M.W. Raynor Techniques for the measurement of trace-moisture in high-purity electronic specialty gases Rev. Sci. Instrum. 74 2003 3909 3933
3. R.B. Bird, W.E. Stewart, and E.N. Lightfoot Transport Phenomena 2nd ed. 2002 John Wiley & Sons Inc. New York pp. 543-581
4. 2 near STP Atmos. Environ. 32 1998 1111 1127
5. D. Sonntag Important new values of the physical constants of 1986, vapor pressure formulations based on the ITS-90, and psychrometer formulae Z. Meteorol. 70 1990 340 344
6. ISO, Guide to the expression of uncertainty in measurement, 1995.
7. B.L. Markham, and F. Rosenberger Velocity and concentration distribution in a Stefan diffusion tube Chem. Eng. Commun. 5 1980 287 298