Fabrication of AlN/Si SAW delay lines with very low RF signal noise

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1320-1324

  Ingrosso, I ^a   Petroni, S ^b   Altamura, D ^a   De Vittorio, M ^a   Combi, C ^b   Passaseo, A ^c  

^a INFM   (Italy)

^b STMICROELECTRONICS   (Italy)

^c CNR   (Italy)

Author keywords

Aluminum nitride; Out of band insertion loss; Piezoelectric; SAW devices; Sputtering

Indexed keywords

BUFFER LAYERS; ELECTRIC DELAY LINES; FABRICATION; INSERTION LOSSES; MEMS; PIEZOELECTRIC DEVICES; SILICON; SILICON NITRIDE;

OUT-OF-BAND INSERTION LOSS; SAW DEVICES;

ALUMINUM COMPOUNDS;

EID: 34247554933     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.100     Document Type: Article

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