Combined electron beam and UV lithography in SU-8

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1058-1061

  Gersborg Hansen, M ^a   Thamdrup, L H ^a   Mironov, A ^a   Kristensen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Combined lithography; Electron beam lithography; Nanolithography; SU 8

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY; NANOTECHNOLOGY; POLYMER FILMS; WSI CIRCUITS;

COMBINED LITHOGRAPHY; NANOMETER SCALE FEATURES; POLYMER DEVICES;

ELECTRON BEAM LITHOGRAPHY;

EID: 34247551257     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.084     Document Type: Article

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