Optimization of COC Hot embossing with soft PDMS tools

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6465, Issue , 2007, Pages

  Zhou, Kaichang ^a   Papautsky, Ian ^a  

^a University of Cincinnati   (United States)

Author keywords

COC; Hot embossing; PDMS; Taguchi method

Indexed keywords

COPOLYMERS; OLEFINS; OPTIMIZATION; TAGUCHI METHODS; TEMPERATURE DISTRIBUTION;

CYCLIC OLEFIN COPOLYMER (COC); HOT EMBOSSING; REPLICATION QUALITY;

POLYDIMETHYLSILOXANE;

EID: 34247384056     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.701281     Document Type: Conference Paper

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