Surface morphology and stress analysis of piezoelectric strontium-doped lead zirconate titanate thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6415, Issue , 2007, Pages

  Sriram, Sharath ^a   Bhaskaran, Madhu ^a   Holland, Anthony S ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

PSZT; RF magnetron sputtering; Stoney's equation; Stress; Surface morphology

Indexed keywords

DOPING (ADDITIVES); FERROELECTRICITY; LEAD COMPOUNDS; PEROVSKITE; PIEZOELECTRIC CERAMICS; PYROELECTRICITY; STRESS ANALYSIS; STRONTIUM; SURFACE MORPHOLOGY;

PIEZOELECTRIC COEFFICIENT; STONEY'S EQUATION; THIN FILM STRESS;

THIN FILMS;

EID: 34247359119     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.695941     Document Type: Conference Paper

References (6)

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