RF magnetron sputtered perovskite-oriented PSZT thin films on gold for piezoelectric and ferroelectric transducers

Electronics Letters

Volumn 42, Issue 4, 2006, Pages 244-245

  Bhaskaran, M ^a   Sriram, S ^a   Holland, A S ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; PEROVSKITE; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

FERROELECTRIC TRANSDUCERS; PSZT THIN FILMS;

MAGNETRON SPUTTERING;

EID: 32944479390     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20063422     Document Type: Article

References (6)

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3. Holland, A.S., Kandasamy, S., Fardin, E., Mitchell, A., and McCulloch, D.: ' Formation of lead lanthanum zirconate titanate films by heat treatments ', COMMAD, Brisbane, Australia 2004
4. Suryanarayan, C., and Norton, M.G.: ' X-ray diffraction: a practical approach ' (Plenum Press, New York 1998)
5. Powder Diffraction Pattern File (PDF), JCPDS-ICCD, Swarthmore, PA 19081, USA
6. Park, C.-S., Kim, S.-W., Park, G.-T., Choi, J.-J., and Kim, H.-E.: ' Orientation control of lead zirconate titanate film by combination of sol-gel and sputtering deposition ', J. Mater. Res., 2005, 20, p. 243-246