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Volumn 156-158, Issue , 2007, Pages 409-412
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Electronic structure of xenon implanted with low energy in amorphous silicon
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Author keywords
Assisted deposition; Binding energy; Relaxation; Trapping; Voids; Xenon
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Indexed keywords
ABSORPTION SPECTROSCOPY;
ELECTRON TRAPS;
ELECTRONIC STRUCTURE;
ION IMPLANTATION;
X RAY PHOTOELECTRON SPECTROSCOPY;
XENON;
ASSISTED DEPOSITION;
VOIDS;
AMORPHOUS SILICON;
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EID: 34247345835
PISSN: 03682048
EISSN: None
Source Type: Journal
DOI: 10.1016/j.elspec.2006.12.064 Document Type: Article |
Times cited : (5)
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References (14)
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