Fabrication of a microfluidic system with integrated electrochemical pump and valves

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6465, Issue , 2007, Pages

  Lee, Dong Eun ^a   Soper, Steve ^a   Wang, Wanjun ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Eelctrochemical microacuator; Electolysis; PDMS; SU 8; UV LIGA

Indexed keywords

ELECTROCHEMICAL ELECTRODES; MICROACTUATORS; MICROFLUIDICS; SILICONES; VALVES (MECHANICAL);

EELCTROCHEMICAL MICROACUATORS; ELECTRICAL SIGNALS; MICROPUMPS; POLYDIMETHYLSILOXANE (PDMS) MEMBRANES;

MEMS;

EID: 34247326595     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.713916     Document Type: Conference Paper

References (13)

1. Kwang W Oh ,Chong H Ahn, A Review of Microvalves, , J.Micromech. Microeng. 16 (2006), pp. R13-R39
2. D.J Laser, J.G.Santiago, A review of micropumps, J.Micromech.Microeng. Vol. 14, 2004, pp 35-64
3. Böhm, B. Timmer, W. Olthuis, P. Bergveld, A closed-loop controlled electrochemically actuated micro-dosing system, J.Micromech.Microeng. 10 (2000), pp. 498-504
4. C.R.Neagu, J.G.E. Gardeniers, M. Elwenspoek, J.J. Kelly, An electrochemical active valve, Electrochimica Acta. Vol. 42 (1997), Nos 20-22, pp. 3367-3733
5. T. Stanczyk, B.Ilic, P.J. Hesketh, A microfabricated electrochemical actuator for large displacements, Journal of Microelectromechanical systems, Vol. 9, No. 3, (Sep. 2000), pp. 314-320
6. th IEEE International Conference on MicroElectroMechanical Systems MEMS 2004, Maastricht, The Netherlands, January, 2004, pp. 334-337
7. H. Suzuki, R. Yoneyama, A reversible electrochemical nanosyringe pump and some considerations to realize low-power consumption, Sensors and Actuators B, Vol.86 (2002), pp. 242-250
8. H. Suzuki, R. Yoneyama, Integrated microfluidic system with electrochemically actuated on-chip pumps and valves, Sensors and Actuators B, Vol.96 (2003), pp. 38-45
9. D.E. Lee, W. Wang, S.Soper, Fabrication and Test of Electrochemical Microactuator. Proceedings of SPIE Symposium on Micromachining and Microfabrication, Microfluidics, BioMEMS, and Medical Microsystems, Volume 6112, Photonics West, January 2006, San Jose, California.
10. A. J. Bard and L. R. Faulkner, Electrochemistry methods: fundamentals and applications, John Wiley & Sons, 1980.
11. Jung-Suk Yoo and Su-Moon Park, An Electrochemical Impedance Measurement Technique Employing Fourie Transform, Anal. Chem., Vol.72, No. 9, pp. 2035-2041
12. Tai-Ran Hsu, MEMS and Microsystems: Design and Manufacturing, Mcgraw-Hill., pp. 98-106
13. R. Ruhmann, K. Pfeiffer, M. Falenski, F. Reuther, R. Engelke and G. Grützner, Su-8 - A high performance material for MEMS application, MST NEWS International Newsletter on Microsystems and MEMS, No.1 Feb, 2002, pp. 41-42