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Volumn , Issue 1685, 2002, Pages 71-76
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Nist electrostatic force balance experiment
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC REALIZATION;
ELECTROSTATIC FORCE BALANCE;
ATOMIC FORCE MICROSCOPY;
CALIBRATION;
CAPACITANCE;
COMPETITION;
MACHINE DESIGN;
MICROELECTROMECHANICAL DEVICES;
ELECTROSTATICS;
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EID: 4444274373
PISSN: 00835560
EISSN: None
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (6)
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