Micropipe formation model via surface step interaction

Materials Science Forum

Volumn 389-393, Issue 1, 2002, Pages 99-102

  Ohtani, Noboru ^a   Katsuno, Masakazu ^a   Fujimoto, Tatsuo ^a   Aigo, Takashi ^a   Yashiro, Hirokatsu ^a  

^a NIPPON STEEL CORPORATION   (Japan)

Author keywords

Micropipes; Spiral growth; Step bunching; Step step interaction

Indexed keywords

CRYSTALLOGRAPHY; DISLOCATIONS (CRYSTALS); HIGH TEMPERATURE EFFECTS; SCREWS; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS; FLOCCULATION; SCREW DISLOCATIONS; WIDE BAND GAP SEMICONDUCTORS;

MICROPIPES; SPIRAL GROWTH; STEP BUNCHING; STEP-STEP INTERACTION; FORMATION MECHANISM; HIGH TEMPERATURE; REPULSIVE INTERACTIONS; SILICON CARBIDES (SIC); STEP-STEP INTERACTIONS;

SILICON CARBIDE;

EID: 34247211100     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.389-393.99     Document Type: Article

References (5)

1. F.C. Frank: Acta. Crystallogr. Vol.4 (1951), p. 497.
2. N. Ohtani, M. Katsuno, T. Aigo, T. Fujimoto, H. Tsuge, H. Yashiro and M. Kanaya: J. Cryst. Growth Vol. 210 (2000), p. 613.
3. J. Takahashi, N. Ohtani and M. Kanaya: J. Cryst. Growth Vol. 167 (1996), p. 596.
4. N. Ohtani, M. Katsuno, J. Takahashi, H. Yashiro and M. Kanaya: Phys. Rev. B Vol. 59 (1999), p. 4592.
5. V.I. Marchenko and A.Ya. Parshin: Sov. Phys. JETP Vol. 52 (1980), p. 129.