Role of crystallized phases in sheet resistance of amorphous AgInSbTe chalcogenide film

Scripta Materialia

Volumn 56, Issue 12, 2007, Pages 1107-1110

  Chou, Chien Chih ^a   Hung, Fei Yi ^a   Lui, Truan Sheng ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Amorphous; Chalcogenide films; Crystallization; Sheet resistance

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CRYSTALLIZATION; SHEET RESISTANCE; SILVER COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

ANNEALING TEMPERATURES; CHALCOGENIDE FILMS; RADIO-FREQUENCY SPUTTERING;

CHALCOGENIDES;

EID: 34247157712     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2007.02.005     Document Type: Article

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