Determination of the electron energy distribution function in the plasma by means of numerical simulations of multiple harmonic components on a Langmuir probe characteristic - Measurements in expanding microwave plasma

Measurement Science and Technology

Volumn 18, Issue 5, 2007, Pages 1235-1249

  Jauberteau, J L ^a   Jauberteau, I ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

Electron energy distribution function; Electrostatic probe; Harmonic components; Langmuir probe; Microwave plasma; Plasma reactor

Indexed keywords

COMPUTER SIMULATION; HARMONIC ANALYSIS; IMPULSE RESPONSE; MEASUREMENT THEORY; MICROWAVE DEVICES; NUMERICAL METHODS;

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); ELECTROSTATIC PROBE; HARMONIC COMPONENTS; LANGMUIR PROBE; MICROWAVE PLASMA; PLASMA REACTORS;

ELECTRON ENERGY LEVELS;

COMPUTER SIMULATION; ELECTRON ENERGY LEVELS; HARMONIC ANALYSIS; IMPULSE RESPONSE; MEASUREMENT THEORY; MICROWAVE DEVICES; NUMERICAL METHODS;

EID: 34247098958     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/5/010     Document Type: Article

References (21)

1. Mott-Smith H M and Langmuir I 1926 Phys. Rev. 28 727-63
2. Johnson E O and Malter L 1950 Phys. Rev. 80 58-68
3. Swift J D 1969 Br. J. Appl. Phys. 2 134-6
4. Bills D G, Holt R B and McClure B T 1962 J. Appl. Phys. 33 29-33
5. Druyvesteyn M J 1930 Z. Phys. 64 781-98
6. Medicus G 1956 J. Appl. Phys. 27 1242-8
7. Fujita F and Yamazaki H 1990 Japan. J. Appl. Phys. 29 2139-44
8. Hayden H C 1987 Comput. Phys. 1 74-5
9. Fernandez J I P, Ballestero J, Colomer V and Hernandez M A 1995 Rev. Sci. Instrum. 66 4625-36
10. Schoenberg K F 1980 Rev. Sci. Instrum. 51 1159-62
11. Kortshagen U and Schlüter H 1991 J. Phys. D: Appl. Phys. 24 1585-93
12. Dyson A, Bryant P and Allen J E 2000 Meas. Sci. Technol. 11 554-9
13. Jauberteau J L, Cinelli M J, Jauberteau I and Aubreton J 1999 J. Phys. D: Appl. Phys. 32 445-55
14. Jauberteau J L, Jauberteau I and Aubreton J 2004 J. Phys. D: Appl. Phys. 37 1241-7
15. Press W H, Flannery B P, Teukolsky S A and Vetterling W T 1989 Numerical Recipes in Pascal: The Art of Scientific Computing (Cambridge: Cambridge University Press)
16. Sugai H, Ghanashev I and Nagatsu M 1998 Plasma Sources Sci. Technol. 7 192-205
17. Singh H and Graves D B 2000 J. Appl. Phys. 87 4098-106
18. Godyak V A, Piejak R B and Alexandrovich B M 1992 Plasma Sources Sci. Technol. 1 36-58
19. Chen F F 1965 Plasma Diagnostic Techniques ed R H Huddlestone and S L Leonard (New York: Academic)
20. Godyak V A and Piejak B B 1990 Phys. Rev. Lett. 65 996-9
21. Popov T K, Tsaneva V N, Stelmashenko N A, Dimitrova M, Blamire M G, Barber Z H and Evetts J E 2005 Plasma Sources Sci. Technol. 14 184-90