Optically-interrogated zero-power MEMS magnetometer

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 336-343

  Vasquez, Daniel J ^a   Judy, Jack W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Ferromagnetic materials; Magnetometers; Magnets; Microelectromechanical devices; Microsensors; Multisensor systems; Optical device fabrication; Optical diffraction

Indexed keywords

FERROMAGNETIC MATERIALS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; MIRRORS; OPTICAL DEVICES; SENSOR DATA FUSION;

CORNER-CUBE REFLECTOR; OPTICAL DIFFRACTION;

MAGNETOMETERS;

EID: 34147181736     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.892795     Document Type: Article

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