Optically-powered wireless transmitter for high-temperature MEMS sensing and communication

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1703-1706

  Suster, M ^a   Ko, W H ^a   Young, D J ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

Data communication; Frequency conversion; Micromechanical devices; Optical resonators; Optical sensors; Optical transmitters; Oscillators; Prototypes; Silicon; Wireless sensor networks

Indexed keywords

ACTUATORS; CAPACITIVE SENSORS; HIGH TEMPERATURE APPLICATIONS; LASER BEAMS; MICROMECHANICAL RESONATORS; MICROSYSTEMS; OPTICAL COMMUNICATION; OPTICAL FREQUENCY CONVERSION; OPTICAL RESONATORS; OPTICAL SENSORS; OPTICAL TRANSMITTERS; OSCILLATORS (ELECTRONIC); RESONATORS; SILICON; TRANSDUCERS; TRANSMITTERS; WIRELESS SENSOR NETWORKS;

CAPACITIVE PRESSURE SENSORS; DATA-COMMUNICATION; HIGH TEMPERATURE MEMS; MICROMECHANICAL DEVICE; PROTOTYPES; TRANSMITTING ANTENNA; WIRELESS DATA TRANSMISSION; WIRELESS TRANSMITTER;

SOLID-STATE SENSORS;

EID: 0842306748     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217112     Document Type: Conference Paper

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