Etching of silicon substrates by using a plasmatron

Journal of the Korean Physical Society

Volumn 50, Issue 3, 2007, Pages 723-727

  Plaksin, Vadim Yu ^a   Joa, Sang Beom ^a   Lee, Heon Ju ^a   Choi, Chi Kyu ^a  

^a Jeju National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34147119557     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.50.723     Document Type: Article

References (9)

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