Surface erosion and modification by ions studied by computer simulation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 258, Issue 1, 2007, Pages 172-177

  Insepov, Z ^a   Norem, J ^a   Swenson, D R ^b   Hassanein, A ^a   Terasawa, M ^c  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b Epion Corporation   (United States)

^c UNIVERSITY OF HYOGO   (Japan)

Author keywords

Coulomb explosion; Crater formation; Electronic excitation; Gas cluster ion beam; Highly charged ion; Molecular dynamics; Shock wave; Sputtering

Indexed keywords

COMPUTER SIMULATION; ENERGY TRANSFER; EROSION; EXTREME ULTRAVIOLET LITHOGRAPHY; ION BOMBARDMENT; MOLECULAR DYNAMICS; SHOCK WAVES; SURFACE TREATMENT;

COULOMB EXPLOSION; CRATER FORMATION; ELECTRONIC EXCITATION; GAS CLUSTER ION BEAMS; ION ENERGY TRANSFER;

ION BEAMS;

EID: 34147114327     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.12.117     Document Type: Article

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