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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 146, Issue 1-4, 1998, Pages 172-177

Electronic excitation effect in the sputtering of conductive materials bombarded by highly charged heavy ions

(6) Sekioka, T a Terasawa, M a Mitamura, T a Stockli M P b Lehnert, U b Cocke, C L b

a UNIVERSITY OF HYOGO (Japan)

b KANSAS STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CHARGED PARTICLES; CONDUCTIVE MATERIALS; COPPER; HEAVY IONS; ION BEAMS; NICKEL; SECONDARY ION MASS SPECTROMETRY; SILICON; SILVER; SPUTTERING;

ELECTRONIC EXCITATION; ELECTRONIC SPUTTERING;

ION BOMBARDMENT;

EID: 0032477042 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(98)00499-6 Document Type: Article

Times cited : (15)

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