Characterization of boron carbon nitride film for humidity sensor

Diamond and Related Materials

Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 1300-1303

  Aoki, Hidemitsu ^a   Shima, Hidekazu ^a   Kimura, Chiharu ^a   Sugino, Takashi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

BCN; BN; Boron carbon nitride; Humidity; Sensor; TDS; Water

Indexed keywords

BORON COMPOUNDS; CARBON NITRIDE; ELECTRON TUNNELING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM THEORY; THERMAL DESORPTION SPECTROSCOPY;

FREQUENCY RANGE; PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION; QUANTUM-MECHANICAL TUNNELING; QUARTZ REACTOR;

THIN FILMS;

EID: 34047257339     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.01.014     Document Type: Article

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