Subsurface enrichment of Co in Si (100) at initial stages of growth at room temperature: A study by high-resolution Rutherford backscattering

Applied Physics Letters

Volumn 90, Issue 13, 2007, Pages

  Dash, S P ^a   Goll, D ^a   Carstanjen, H D ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT COMPOUNDS; DIFFUSION; OPTICAL RESOLVING POWER; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE PROPERTIES;

HIGH-RESOLUTION RUTHERFORD BACKSCATTERING; ROOM TEMPERATURE; SUBSURFACE ENRICHMENT;

COBALT;

EID: 34047182562     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2717525     Document Type: Article

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