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A comparison between wet HF etching and vapor HF etching for sacrificial oxide removal
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B. Du Bois, G. Vereecke, A. Witvrouw, P. De Moor, C. Van Hoof, A. De Caussemaeker, A. Verbist, "HF etching of Si-oxides and Sinitrides for surface micromachining," Proc. of the Sensor Technology Conf. 2001, pp. 131-136, 2001.
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