Fabrication of nanodot array molds for photonanoimprint using anodic porous alumina

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 1, 2007, Pages 115-119

  Kurashima, Yuichi ^a   Yokota, Yoshihiko ^a   Miyamoto, Iwao ^a   Itatani, Taro ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ANODIC OXIDATION; GLASS; MOLDS; POROSITY; POROUS MATERIALS;

GLASS REPLICA; NANODOT ARRAYS; PHOTONANOIMPRINTED PATTERN;

NANOSTRUCTURED MATERIALS;

EID: 34047123839     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2429669     Document Type: Article

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