Technological development of THz microfluidic microsystems for biological spectroscopy

Conference Digest of the 2004 Joint 29th International Conference on Infrared and Millimeter Waves and 12th International Conference on Terahertz Electronics

Volumn , Issue , 2004, Pages 549-550

  Mille, V ^a   Bourzgui, N B ^a   Mejdjoub, F ^a   Desplanque, L ^a   Lampin, J F ^a   Supiot, P ^b   Bocquet, B ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIV LILLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; ELECTROOPTICAL EFFECTS; FLUIDICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERS; SILICON; SPECTROSCOPIC ANALYSIS; THICKNESS MEASUREMENT;

DEPOSITION PROCESS; ELECTRO-OPTIC TECHNIQUES; MASS PRODUCTION; MICROFLUIDIC MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 16244419385     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. S.W. Smye, J.M. Chamberlain, A.J. Fitzgerald, E. Berry, "The interaction between Terahertz radiation and biological tissue", Phys. Med. Biol., Vol.46, pp.R101-R112, 2001
2. M. Nagel, P.H. Bolivar, M. Brucherseifer, H. Kurz, A. Bosserhoff, R. Buttner, Integrated THz technology for label-free genetic diagnostics, Applied Physics Letters, Vol.80, n°1, pp154-156, 2002
3. Bocquet B., Bourzgui N.E., Guhel Y., Mille V, Design of silicon-PPTMDS bio-MEMS by cold RPECVD, Proc. Of SPIE Microfluidics, BioMEMS and Medical Microsystems II, Vol.5345, pp.118-129, USA, Jan 2004
4. L. Desplanque, J.F. Lampin, F. Mollot, Appl. Phys. Lett., Vol. 84, p.2049, 2004
5. W. Heinrich, Quasi-TEM Description of MMIC Coplanar Lines Including Conductor-Loss Effects, IEEE Trans. on Microwave Theory and Techniques, Vol.41, n°1, 1993.