Characteristics of surface-wave plasma with air-simulated N 2-O2 gas mixture for low-temperature sterilization

Journal of Physics D: Applied Physics

Volumn 40, Issue 3, 2007, Pages 803-808

  Xu, L ^a   Nonaka, H ^a   Zhou, H Y ^a   Ogino, A ^a   Nagata, T ^b   Koide, Y ^b   Nanko, S ^c   Kurawaki, I ^d   Nagatsu, M ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

^b HAMAMATSU UNIVERSITY SCHOOL OF MEDICINE   (Japan)

^c Nissin Inc   (Japan)

^d GMA Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC EMISSION SPECTROSCOPY; ETCHING; GAS MIXTURES; NITRIC OXIDE; SCANNING ELECTRON MICROSCOPY; SURFACE WAVES;

AIR DISCHARGE; DISCHARGE GASES; GAS DISCHARGE PLASMAS; STERILIZATION;

PLASMA APPLICATIONS;

EID: 33947683846     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/3/017     Document Type: Article

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