Designing an efficient microwave-plasma source, independent of operating conditions, at atmospheric pressure

Plasma Sources Science and Technology

Volumn 16, Issue 1, 2007, Pages 173-182

  Fleisch, T ^a   Kabouzi, Y ^a   Moisan, M ^a   Pollak, J ^a   Castaos Martinez E ^a   Nowakowska, H ^b   Zakrzewski, Z ^b  

^a UNIVERSITÉ DE MONTRÉAL   (Canada)

^b INSTITUTE OF FLUID FLOW MACHINERY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTROMAGNETIC WAVES; IMPEDANCE MATCHING (ELECTRIC); MICROWAVES; OPTIMIZATION; WAVEGUIDES;

ADMIXED GASES; ELECTROMAGNETIC-SURFACE-WAVE LAUNCHERS; EQUIVALENT-CIRCUIT THEORY; GAS FLOW RATES;

PLASMA SOURCES;

EID: 33947620647     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/1/022     Document Type: Conference Paper

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