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Volumn 46, Issue 6, 2007, Pages 827-833

Improving resolution in microscopic holography by computationally fusing multiple, obliquely illuminated object waves in the Fourier domain

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FOURIER OPTICS; FREQUENCY RESPONSE; IMAGE RESOLUTION; OPTICAL MICROSCOPY; REFLECTION; WAVEFRONTS;

EID: 33947510435     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.000827     Document Type: Article
Times cited : (31)

References (10)
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  • 2
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    • Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
    • M. Takeda, H. Ina, and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, 156-160 (1982).
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    • Takeda, M.1    Ina, H.2    Kobayashi, S.3
  • 3
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    • Direct phase determination in hologram interferometry with use of digitally recorded holograms
    • U. Schnars, "Direct phase determination in hologram interferometry with use of digitally recorded holograms," J. Opt. Soc. Am. A 11, 2011-2015 (1994).
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    • Schnars, U.1
  • 4
    • 0000239175 scopus 로고    scopus 로고
    • Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms
    • E. Cuche, P. Marquet, and C. Depeursinge, "Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms," Appl. Opt. 38, 6994-7001 (1999).
    • (1999) Appl. Opt , vol.38 , pp. 6994-7001
    • Cuche, E.1    Marquet, P.2    Depeursinge, C.3
  • 5
    • 0043101055 scopus 로고    scopus 로고
    • C. Thomas Jr., T. M. Bahm, L. R. Baylor, P. R. Bingham, S. W. Burns, M. Chidley, L. Dai, R. J. Delahanty, C. J. Doti, A. El-Khashab, R. L. Fisher, J. M. Gilbert, J. S. Goddard, Jr., G. R. Hanson, J. D. Hickson, M. A. Hunt, K. W. Hylton, G. C. John, M. L. Jones, K. R. Macdonald, M. W. Mayo, I. McMackin, D. R. Patek, J. H. Price, D. A. Rasmussen, L. J. Schaefer, T. R. Scheidt, M. A. Schulze, P. D. Schumaker, B. Shen, R. G. Smith, A. N. Su, K. W. Tobin, Jr., W. R. Usry, E. Voelkl, K. S. Weber, P. G. Jones, and R. W. Owen, Direct to digital holography for semiconductor wafer defect detection and review, in Design, Process Integration, and Characterization for Microelectronics, Proc. SPIE 4692, 180-194 (2002).
    • C. Thomas Jr., T. M. Bahm, L. R. Baylor, P. R. Bingham, S. W. Burns, M. Chidley, L. Dai, R. J. Delahanty, C. J. Doti, A. El-Khashab, R. L. Fisher, J. M. Gilbert, J. S. Goddard, Jr., G. R. Hanson, J. D. Hickson, M. A. Hunt, K. W. Hylton, G. C. John, M. L. Jones, K. R. Macdonald, M. W. Mayo, I. McMackin, D. R. Patek, J. H. Price, D. A. Rasmussen, L. J. Schaefer, T. R. Scheidt, M. A. Schulze, P. D. Schumaker, B. Shen, R. G. Smith, A. N. Su, K. W. Tobin, Jr., W. R. Usry, E. Voelkl, K. S. Weber, P. G. Jones, and R. W. Owen, "Direct to digital holography for semiconductor wafer defect detection and review," in Design, Process Integration, and Characterization for Microelectronics, Proc. SPIE 4692, 180-194 (2002).
  • 6
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    • M. Schulze, M. Hunt, M. Mayo, E. Voelkl, J. Hickson, W. Usry, R. Smith, R. Bryant, and C. Thomas, Jr., Semiconductor wafer defect detection using digital holography, in Process and Materials Characterization and Diagnostics in IC Manufacturing II, Proc. SPIE 5041, 183-193 (2003).
    • M. Schulze, M. Hunt, M. Mayo, E. Voelkl, J. Hickson, W. Usry, R. Smith, R. Bryant, and C. Thomas, Jr., "Semiconductor wafer defect detection using digital holography," in Process and Materials Characterization and Diagnostics in IC Manufacturing II, Proc. SPIE 5041, 183-193 (2003).
  • 7
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    • Proc. SPIE
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    • Bingham, P.1    Tobin, K.2    Hanson, G.3    Simpson, J.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.