Analysis on the low-k benzo-cyclo-butene passivation of psuedomorphic high electron mobility transistors

Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn 2002-January, Issue , 2002, Pages 349-352

  Sul, Woo Suk ^a   Han, Hyo Jong ^a   Lim, Byoung Ok ^a   Lee, Bok Hyoung ^a   Lee, Sung Dae ^a   Kim, Mi Ra ^a   Kim, Sam Dong ^a   Rhee, Jin Koo ^a  

^a Dongguk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BUTENES; ELECTRON MOBILITY; MICROELECTRONICS; PASSIVATION; SEMICONDUCTING ALUMINUM COMPOUNDS;

BENZO CYCLO BUTENE LAYERS; BENZO CYCLO BUTENES; COMPARATIVE STUDIES; LOW DIELECTRIC CONSTANTS; NOISE CHARACTERISTIC; PASSIVATION MATERIALS; PSEUDO-MORPHIC HIGH ELECTRON MOBILITY TRANSISTORS; SURFACE PASSIVATION;

HIGH ELECTRON MOBILITY TRANSISTORS;

EID: 33947409816     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COMMAD.2002.1237262     Document Type: Conference Paper

References (3)

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