Surface morphology and sensing property of NiO-WO3 thin films prepared by thermal evaporation

Sensors

Volumn 5, Issue 12, 2005, Pages 519-528

  Na, Dong Myong ^a   Satyanarayana, L ^a   Choi, Gwang Pyo ^b   Shin, Yong Jin ^a   Park, Jin Seong ^a  

^a Chosun University   (South Korea)

^b Jeonnam Advanced Materials Industrialization Center   (South Korea)

Author keywords

Surface morphology; Thermal evaporation; Thin films; Tungston oxide

Indexed keywords

ALUMINA; DEPOSITION; EVAPORATION; FILM GROWTH; MORPHOLOGY; OXIDE FILMS; SCANNING ELECTRON MICROSCOPY; SURFACE MORPHOLOGY; THERMAL EVAPORATION; THIN FILMS; VACUUM EVAPORATION; X RAY DIFFRACTION;

CRYSTALLANITY; DEPOSITION SEQUENCES; HIGH VACUUM; OPTIMUM DEPOSITION; POLYCRYSTALLINE GRAINS; SENSING CHARACTERISTICS; SENSING PROPERTY;

GRAIN GROWTH;

EID: 33947378585     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s5120519     Document Type: Article

References (10)

1. Papadopoulos, C. A.; Vlachos, D. S.; Avaritsiotis, J. N. Comparative study of various metal oxide based gas sensor architectures. Sensors and Actuators B 1996, 32, 61-69.
2. 3 films. Sensors and Actuators B 1996, 35-36, 112-118.
3. x gas sensor. Sensors and Actuators B 1998, 50, 9-18.
4. 3 gas sensing films. Thin Solid Films 1995, 256, 247-252.
5. 3 thin film gas sensors. Part 1. Thin film devices, Sensors and Actuators. Thin Solid Films 1996, 257, 258-265.
6. Manno, D.; Serra, A.; Di Giulio, M.; Micocci, G.; Tepore, A. Physical and structural characterization of tungsten oxide thin films for NO gas detection, Thin Solid Films, 1998, 324, 44-51.
7. 3 films. Sensors and Actuators B 1991, 5, 155-159.
8. 2S sensitive tungsten oxide films. Sensors and Actuators B 1996, 31, 167-174.
9. Xu, Z.; Vetelino, J. F.; Lee, R.; Parker, D. C. Electrical properties of tungsten trioxide films. J. Vac. Sci. Techonol. A 1990, 8, 3634-3638.
10. 3-based gas sensors prepared by thick film process. Solid State Ionics 2002, 752-753, 827-832.