Electrochemical synthesis and application of NF3

Journal of Fluorine Chemistry

Volumn 128, Issue 4, 2007, Pages 296-310

  Tasaka, Akimasa ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

Electrochemical fluorination; Functional thin film; Nitrogen trifluoride; Plasma etching; Silicon carbide

Indexed keywords

EID: 33947261064     PISSN: 00221139     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jfluchem.2006.11.007     Document Type: Review

References (47)

1. Colburn C.E. Advances in Fluorine Chemistry, vol. 3 (1963), Butterworth, London p. 52
2. Miller H.C., and Loomis F.D. Encyclo. Chem. Tech., Fluorine Compound Inorganic (Nitrogen), vol. 11. third ed. (1966) p. 393
3. Tasaka A., and Watanabe N. In: Watanabe N. (Ed). Fusso to Kogyo II (Fluorine Chemistry and Industry Part II), Chemistry of Inorganic Fluorides-Fluoride Compounds of Nitrogen (1984), Kagaku Kogyosha 1-34
4. McFadden K.O., and Tschuikow E. J. Phys. Chem. 77 (1973) 1475-1478
5. Schott G.L., Blair L.S., and Morgan Jr. J.D. J. Phys. Chem. 77 (1973) 2823-2830
6. Dorko E.A., et al. J. Chem. Phys. 63 (1975) 3596-3601
7. Evans P.J., and Tschuikow-Roux E. J. Chem. Phys. 65 (1976) 4202-4209
8. Rogers H.H. Ind. Eng. Chem. 51 (1959) 309-310
9. Hoffman C.J., and Neville R.G. Chem. Rev. 62 (1962) 1-18
10. Schmeiser M., and Sartori P. Chem. Ing. Tech. 36 (1964) 9
11. Glemser O., Bierman U., Knaak J., and Haas A. Chem. Ber. 98 (1965) 446-450
12. Glemser O., and Bierman U. Chem. Ber. 100 (1967) 1184-1192
13. Glemser O., Wegener J., and Mews R. Chem. Ber. 100 (1967) 2474-2483
14. Glemser O., and Bierman U. Chem. Ber. 100 (1967) 2484-2490
15. Tasaka A., and Glemser O. Z. Anorg. Allg. Chem. 409 (1974) 163-170
16. Chem. Eng. News 43 (6) (1965) 47.
17. Lyman J.L., and Jensen R.J. Chem. Phys. Lett. 13 (1972) 421-424
18. Lyman J.L., and Jensen R.J. J. Phys. Chem. 77 (1972) 883-888
19. Padrick D., and Gusinow M.A. Chem. Phys. Lett. 24 (1974) 270-274
20. Nakayama S., Tsuneto K., Tasaka A., Ohachi T., Naito D., and Taniguchi I. Proceedings of Second Symposium on Dry-process. Tokyo, October (1980) 115-122
21. Eisele K.M. J. Electrochem. Soc. 128 (1981) 123-126
22. Ianno N.J., Greenberg K.E., and Verdeyen J.T. J. Electrochem. Soc. 128 (1981) 2174-2179
23. Kawamura A., Tsuneto K., Ohachi T., Fujii T., and Taniguchi I. Proceedings of Fourth Symposium on Dry-process. Tokyo, Octber (1982) 39
24. Nikkei Microdevices (1985) 113.
25. J.F. Tompkins, U.S. Patent 3,235,474 (1966).
26. Tojo T., Hiraiwa J., and Watanabe N. Denki Kagaku (presently Electrochemistry) 66 (1998) 563-567
27. Tasaka A. Curr. Top. Electrochem. 10 (2004) 1-36
28. Nakajima T., Ogawa T., and Watanabe N. J. Electrochem. Soc. 134 (1987) 8-11
29. Watanabe N., Chong Y., Aritsuka M., Kanemaru M., and Mikami J. Proceedings of the fourth Japan-China Bilateral Conference on Molten Salt Chemistry and Technology. Kyoto, Japan (1992) 111-114
30. Glemser O., Schröder J., and Knaak J. Chem. Ber. 99 (1966) 371-374
31. Massonne J. Chem. Ing. Tech. 41 (1969) 695-742
32. A. Mimoto, Doctor Thesis, Doshisha University, 2006.
33. Tasaka A., Kobayashi H., Negami M., Hori M., Osada T., Nagasak K., Ozaki T., Nakayama H., and Katamura K. J. Electrochem. Soc. 144 (1997) 192-197
34. A. Tasaka, Doctor Thesis, Kyoto University, 1970.
35. Tasaka A., and Watanabe N. Yoyuen (presently Molten Salts) 13 (1970) 152-173
36. Tasaka A. Yoyuen (presently Molten Salts) 24 (1981) 195-226
37. Tasaka A., Kawagoe T., Takuwa A., Yamanaka M., Tojo T., and Aritsuka M. J. Electrochem. Soc. 145 (1998) 1160-1164
38. Tramsek M., and Zemva B. Acta Chim. Slov. 49 (2002) 209-220
39. Tasaka A., Komura A., Uchimoto Y., Inaba M., and Ogumi Z. J. Polym. Sci. A: Polym. Chem. 34 (1996) 193-198
40. Fukutsuka T., Abe T., Inabe M., Ogumi Z., Tsuji N., and Tasaka A. Tanso 190 (1999) 252-256
41. Tuinstra F., and Koenig J.L. J. Chem. Phys. 53 (1970) 1126-1130
42. Katagiri G. Tanso 175 (1996) 304-313
43. Knight D.S., and White W.B. J. Mater. Res. 4 (1989) 385-393
44. Katagiri G., Ishida H., and Ishitani A. Carbon 26 (1988) 565-571
45. Tsuneto K., Nakayama S., Kawamura A., Tasaka A., Ohachi T., and Taniguchi I. Sci. Eng. Rev. Doshisha Univ. 24 4 (1984) 252-261
46. Tasaka A., Takahashi K., Tanaka K., Shimizu K., Mori K., Tada S., Shimizu W., Abe T., Inaba M., Ogumi Z., and Tojo T. J. Vacuum. Sci. Technol. A 20 4 (2002) 1254-1260
47. A. Tasaka, E. Watanabe, T. Kai, W. Shimizu, T. Kanatani, M. Inaba, T. Tojo, M. Tanaka, T. Abe, Z. Ogumi, J. Vac. Sci. Technol. A, submitted for publication.