Practical high-speed metal-based optical microscanning devices with low production cost

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 730-733

  Park, Jae Hyuk ^a   Akedo, Jun ^a   Sato, Harumichi ^a   Lebedev, Maxim ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; NATURAL FREQUENCIES; OPTICAL SYSTEMS; PIEZOELECTRIC DEVICES; RESONANCE; SCANNING; VACUUM;

AEROSOL DEPOSITION METHOD (ADM); METAL SCANNERS; MICROSCANNING DEVICES; VACUUM PACKAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 33750126082     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. H. Urey, "Torsional MEMS scanner design for high-resolution display systems", Proc. SPIE, vol. 4773, pp. 27-37, 2002.
2. N. Asai et al., "a novel high resolution optical scanner actuated by aerosol deposited PZT films", Proc. IEEE 16th Annual Int. Conf. MEMS 2003, pp. 247-250.
3. 3 thick films prepared for microactuators by aerosol deposition", Appl. Phys. Lett., vol. 77, pp. 1710-1712, 2000.
4. 3 thick films formed by aerosol deposition method", Journal of Crystal Growth, vol. 235, pp. 415-420, 2002.