Theoretical analyses for laser machining microchannels and demonstration of their uses in manufacture of a microfluidic optical switch

Surface Review and Letters

Volumn 13, Issue 6, 2006, Pages 795-802

  Lim, Daniel ^a   Santoso, Erna Gondo ^b   Teh, Kim Ming ^a   Wan, Stephen ^a   Zheng, H Y ^a,b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

CO2 laser; Laser micromachining; Microfluidic; Optical bubble switch

Indexed keywords

COST EFFECTIVENESS; MICROFABRICATION; MICROFLUIDICS; MICROPROCESSOR CHIPS; OPTICAL SWITCHES; SEMICONDUCTING SILICON;

LASER MACHINING PARAMETERS; LASER MICROMACHINING; OPTICAL BUBBLE SWITCH;

LASER BEAM EFFECTS;

EID: 33847686391     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X06008876     Document Type: Article

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