P-spray implant optimization for the fabrication of n-in-p microstrip detectors

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 573, Issue 1-2, 2007, Pages 8-11

  Fleta, Celeste ^a   Lozano, Manuel ^a   Pellegrini, Giulio ^a   Campabadal, Francesca ^a   Rafí, Joan Marc ^a   Ullán, Miguel ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Microstrip detector; n in p; P spray; Silicon detector

Indexed keywords

COMPUTER SIMULATION; ELECTRIC PROPERTIES; OPTIMIZATION; PARTICLE ACCELERATORS; SILICON DETECTORS;

MICROSTRIP DETECTORS; N-IN-P; P-SPRAY;

MICROSTRIP DEVICES;

EID: 33847678565     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2006.10.246     Document Type: Article

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