Non-contact measurement of sheet resistance and leakage current: Applications for USJ-SDE/Halo junctions

Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005

Volumn 2005, Issue , 2005, Pages 41-44

  Faifer, V N ^a   Current, M I ^a   Nguyen, T ^a   Wong, T M H ^a   Souchkov, V V ^a  

^a Frontier Semiconductor   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33847321132     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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